LED RF Plasma Equipment

Iyo LCD RF Plasma Equipment yakagadzirirwa chaizvo kurapwa kwepamusoro kwemvura yekristaro yekuratidzira zvikamu uye zvine chekuita nemagetsi zvinhu. Iwo ese muchina zviyero 900W × 1750H × 1200D (mm). Kamuri yayo yekutsvaira, yakavakwa kubva kusimbi isina tsvina, inoyera 450 × 300 × 450 mm uye inogara kusvika matanhatu akaturikidzana matireyi mubatch rimwe chete. Magadzirirwo aya anobvumira sisitimu kuti itsigire zvese-zviyedzo zvezviyero uye{10}}huwandu hwekugadzirwa kwemaindasitiri.

 

Nemaonero ekushanda, mudziyo unosanganisa-zvikamu zvemagetsi zvemhando yepamusoro zvakatorwa kubva kumhando dzinozivikanwa pasi rose, zvichiita-kugadzikana kushanda kwenguva refu. Iyo sisitimu inopa ese manyorero uye akazara otomatiki modhi, achibvumira kuchinjika mukushanda. Matatu-matanho matatu ekutonga masimba{5}anovharidzira mushandisi, mainjiniya, uye mukana wepamusoro wevashandisi-inovimbisa kugadzirwa zvisina njodzi uye inodzivirira zvigadziriso zvisina mvumo. Kuti kugadzirwa kutaridzike, muchina unoratidzira yakabatanidzwa yekurekodha system, inorekodha otomatiki uye nekutsigira data rekuita pamwedzi. Vashandisi vanogona kuchengeta uye kurangarira nhamba isingaverengeki yemabikirwo ekuita, ichipa nyore kuchinjika kune akasiyana zvigadzirwa uye maapplication.

Iyo yepakati sisitimu yekumisikidza inotora simbi isina simbi mapaipi uye mabhero, pamwe neyakajairwa GDQ vacuum mavharuvhu ekuti ashande echaust control. Vacuum kuyerwa kunoitwa nePirani resistance vacuum gauge, iyo inovimbisa kuverenga kwakaringana uye kwakagadzikana. Yepamusoro-vacuum gedhi vharuvhu inosanganisirwa yekamuri yega. Iyo yekudzora sisitimu inotsamira paMitsubishi PLC ine ekuwedzera modules, kuendesa chaiyo uye yakavimbika process parameter manejimendi.

Panyaya yehunyanzvi hwekuita, midziyo inopa matatu gasi nzira, inotsigira nitrogen (N₂), argon (Ar), hydrogen (H₂), uye oksijeni (O₂). Iyo vacuum level inodzorwa pakati pe10-50 Pa, nekumanikidza kushanduka kunochengetwa mukati me5%. Gasi kuyerera mitengo inogona kugadziriswa mukati meiyo 0-200 sccm renji. Kutonhodza nitrogen, mhepo yakamanikidzwa, uye maitiro egasi anopindirana anoshanda zvakachengeteka pa0.45 MPa kana pasi. Iyo plasma yekurapa modhi yakananga plasma, ine anodinha anode uye cathode electrodes. Pakati pemapoka maviri nemana e electrode anogona kuiswa panguva imwe chete. Electrode imwe neimwe ine nzvimbo inoshanda ye 380 × 310 mm, uye nzvimbo iri pakati pema electrode inogadziriswa, ine mwero we 2.5 cm.

Mukushandiswa kwemaindasitiri, iyi midziyo inonyanya kukosha pakuchenesa kwepamusoro isati yaitwa encapsulation (molding) maitiro. Kurapa kwePlasma kunobvisa organic zvinosvibisa uye kumisa iyo substrate pamusoro, zvinobudirira kuwedzera nzvimbo yekusangana uye kusimba kwekunamatira. Izvi zvinodzivirira delamination kana kupatsanurwa panguva yekuumbwa uye zvinobatsira kune yakakwirira chigadzirwa kuvimbika. Iine dhizaini yakasimba, mabasa epamberi ekudzora, uye kuita kwayo chaiko, sisitimu inoburitsa isingachinjiki, inodzokororwa kurapwa kweplasma mhinduro, ichiita kuti ive mhinduro yakanakira yeLCD pani kugadzira pamwe nesemiconductor yekurongedza maapplication.

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