Zvakananga Zvishandiso zvePlasma Cleaners

Plasma yekuchenesa / etching michina inogadzira plasma nekuisa maelectrode maviri mumudziyo wakavharwa kugadzira munda wemagetsi. Pombi yevacuum inoshandiswa kuchengetedza imwe vacuum level. Sezvo gasi rinowedzera kushomeka, chinhambwe chiri pakati pemamorekuru uye kufamba kwemahara kwemamorekuru kana ion kunowedzerawo. Pasi pesimba remunda wemagetsi, maion aya anodhumhana oita plasma. Aya maion ane reactive zvakanyanya, ane simba rakakwana rekupwanya anenge ese emakemikari mabhondi, zvichiita kuti makemikari aite pane chero nzvimbo yakafumurwa. Maplasma egasi akasiyana ane makemikari akasiyana. Semuyenzaniso, okisijeni plasma ine oxidizing zvakanyanya, inokwanisa oxidizing photoresist kuburitsa gasi, nokudaro kuwana kuchenesa mhedzisiro. Corrosive gasi plasma ine yakanakisa anisotropy, iyo inosangana nezvinodiwa zveetching. Kurapa kwePlasma kunoburitsa kupenya, nokudaro zita rekuti glow discharge.
Iyo nzira yekuchenesa plasma inotsamira zvakanyanya pa "activation" yezvimedu zvinoshanda muplasma kubvisa tsvina yepasi. Panyaya yemaitiro ekuita, kuchenesa plasma kunowanzobatanidza maitiro anotevera: inorganic magasi anofara kuita plasma state; zvinhu zvegasi zvinoiswa panzvimbo yakasimba; mapoka adsorbed anoita nemamorekuru panzvimbo yakasimba kuumba mamorekuru echigadzirwa; mamorekuru echigadzirwa anoora muchikamu chegasi; uye zvisaririra zvemhinduro zvinobviswa kubva pamusoro.

Iyo inonyanya kukosha yeplasma yekuchenesa tekinoroji ndeyekuti inogona kubata chero substrate mhando, kusanganisira simbi, semiconductors, okisidhi, uye yakawanda polymer zvinhu zvakaita se polypropylene, polyester, polyimide, polyvinyl chloride, epoxy, uye kunyange polytetrafluoroethylene. Inogona kuchenesa zvose zviri pamusoro uye nzvimbo dzakananga, pamwe chete nezvivako zvakaoma.